The manufacturing of components in semiconductors, sensors and other nano-scale devices rely on the process of microfibration. As the devices are shrinked in size, the tolerances needed for the production becomes exceedingly tight.
The conditions become so tricky that even the slightest deviation results in production failure. Companies cannot afford increasing product defects and hence, precision is a compelling requirement.
This is where Moorfield Nanotechnology shines with their high-tech innovations. They are known for offering precision solutions for advanced etching systems. For this year’s ArabLab 2024 exhibition, they are joining our showcase where they will feature some of their top-notch products.
Starting from 24 to 26 September 2024, we will be stationed in Hall S2-332, Dubai World Trade Centre where you can spot Moorfield. Here we give you a quick overview of everything that this pioneering company will be bringing for our showcase.
nano Etch by Moor field Nanotechnology
This is a benchtop etching system that has been optimised for soft-etching & fluorine-chemistry etching. It is designed to etch substrates of up to 6” diameter. The origins of this product came into being when the University of Manchester, UK had a requirement for an etching tool that enabled for precision etching of sensitive 2D materials that was not available in conventional RIE tools.
Hence, in collaboration with the graphene group at the National Graphene Institute in University of Manchester, Moorfield developed the nanoETCH system. The product has been optimised to provide Soft Etching of carbon nanomaterials, specifically graphene with Ar and/or O2 gases.
The optional Fluorinated Process Gas module amplifies the range of Soft Etching to include fine-etch control of harder materials such as 2D materials beyond graphene such as hBN and MoS2 as well as SiO2 and Si.
nanoETCH tools can be fitted with stages for 3″/75mm, 4″/100 mm or 6″/150 mm maximum substrate diameters.
Key Features
Benchtop configuration
Soft-etching technology: Precision RF power <30 W
Up to 3 MFC-controlled process gases
Up to 6”/150 mm diameter stages
Fully automatic operation via touchscreen HMI
Define/save multiple process recipes
PC connection for data-logging
Base pressures <5 × 10-7mbar
Equipped for easy servicing
Comprehensive safety features
Cleanroom compatible
Proven performance
Moorfield is bringing this incredible product to be featured in our showcase for ArabLab 2024.
nanoPVD-S10A-WA by Moorfield Nanotechnology
This one is a wide-area version of benchtop PVD systems. It has been optimised for magnetron sputtering allowing uniform coating of substrate diameters up to 8”. The magnetrons are water-cooled that enables it to deliver sustained high-power operation and accept industry-standard targets.
Additionally, this product comes with all attractive features of the nanoPVD range including turbomolecular pumping systems, recipe-based automated operation via touchscreen HMIs, and compact designs for benchtop location.
Key Features
Benchtop package
Water-cooled magnetron sputtering sources for industry-standard 2″ targets
MFC-controlled process gases
DC and/or RF power supplies
Fully automatic operation via touchscreen HMI
Define/save multiple process recipes
Up to 4” diameter substrates
Base pressures <5 × 10-7 mbar
Equipped for easy servicing
Comprehensive safety features
Cleanroom compatible
Proven performance
MiniLab 060 by Moorfield Nanotechnology
MiniLab 060 is a modular design PVD systems with front-loading box type chambers. Similar to nanoPVD, this innovation has also been optimised for magnetron sputtering. The capacity it can handle is for substrates up to 11″ diameter.
The vacuum chamber is on a double-rack frame that houses all system control electronics and power supplies. Typically, deposition sources are mounted on the chamber baseplate, however, availability of sputter-down configurations is also there.
Generally at the top of the chamber, substrate stages can accommodate sizes up to 11” diameter. Substrate heating, rotation, bias and Z-shift are available, together with planetary stages and source and substrate shutters.
Configurations range from a manually operated thermal evaporation system up to a multi-technique tool with fully automated process control.
Key Features
Key features
Modular design
Front-loading box-type vacuum chamber
Turbomolecular and cryo pumping systems
Base pressures <5 × 10-7 mbar
Metals, dielectrics and organics deposition
Up to 11” diameter substrates
Up to 4 sources
Touchscreen HMI/PC for system control
Equipped for easy servicing
Comprehensive safety features and interlocks
Cleanroom compatible
Load-locks available
Perks of Opting for Moorfield Coating and Etching Solutions
The range of advanced products from Moorfield Nanotechnology have been developed to provide unmatched perks for precise material processing. While the nanoETCH system is a perfect solution for performing soft etching on sensitive materials such as graphene and advanced 2D materials.
The nanoPVD system excels in the uniform coating process through water cooled magnetron sputtering. Optimised similarly is the MiniLab 060 that is suitable for substrates up to 11”.
All the systems have been manufactured with highest safety standards that leaves no room for encountering hazards during their operations. They also have cleanroom capability, automated process controls and engineered for easy servicing.
The features and design equipped to these systems make them indispensable tools for advanced research and development in the field of material science and nanotechnology.
Join Us to Experience Them All
We are bringing these incredible innovations along with the manufacturer themselves at our showcase for ArabLab 2024. You will have the chance to meet Moorfield Nanotechnology and get to explore their products up close.
From sharing their expertise to giving you in-depth access to their products, you will get all inclusive experience when you visit our stand. So, what are you waiting for? Come join us in Hall S2-332, Dubai World Trade Centre from 24-26 September 2024 to see them live.
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